Higher order harmonics suppression in extreme ultraviolet and soft x-ray

Chen Yong, Wei Lai, Qian Feng, Yang Zuhua, Wang Shaoyi, Wu Yinzhong, Zhang Qiangqiang, Fan Quanpin, Cao Leifeng^†

(color online) Output of monochromator with (a) photon sieve and (b) laminar grating.