Near-interface oxide traps in 4H–SiC MOS structures fabricated with and without annealing in NO
Sun Qiu-Jie
1
, Zhang Yu-Ming
1
, Song Qing-Wen
1, †
, Tang Xiao-Yan
1, ‡
, Zhang Yi-Meng
1
, Li Cheng-Zhan
2
, Zhao Yan-Li
2
, Zhang Yi-Men
1
(color online) Variations of
with stress time for (a)NO POA sample and (b) N
2
POA sample.