Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
(color online) Depth dependence of the TDD information of samples A (a) and B (b).
Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction |
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(color online) Depth dependence of the TDD information of samples A (a) and B (b). |
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