Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
Miao Yuan-Hao
†
, Hu Hui-Yong
‡
, Li Xin
, Song Jian-Jun
, Xuan Rong-Xi
, Zhang He-Ming
(color online) Ge-on-Si depth profile of TDD in Ref. [
17
].