Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction
(color online) (004) rocking curve scan of Si substrate obtained by HR-XRD.
Evaluation of threading dislocation density of strained Ge epitaxial layer by high resolution x-ray diffraction |
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(color online) (004) rocking curve scan of Si substrate obtained by HR-XRD. |
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