Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model
(color online) Spatial distributions of the cycle-averaged (a) electron pressure heating, (b) electron ohmic heating, (c) electron heating in all the discharge regions, (d) electron heating in powered sheath region, (e) electron heating in grounded sheath region, (f) electron energy loss, at the gas pressures of 0.3, 0.5, 0.7, 1.0, and 1.5 Torr, respectively, in the 6000th cycle.
