Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model
(color online) (a) Spatial distributions of the cycle-averaged electron temperature, (b) maxima of electron temperature in powered sheath region, in grounded sheath region and electron temperature in the middle of the bulk plasma region, (c) positions of maximum electron temperature in powered sheath region and in grounded sheath region, at the gas pressures of 0.3, 0.5, 0.7, 1.0, and 1.5 Torr, respectively, in the 6000th cycle.
