Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model |
(color online) Electron densities at x = 0.1d for the gas pressures of (a) 0.3, (b) 0.5, (c) 0.7, (d) 1.0, and (e) 1.5 Torr from the 5970th to the 6000th cycle. |