Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model
(color online) Cycle-averaged (a) ion current densities and (b) ion energy densities on powered electrode and on grounded electrode at the gas pressures of 0.3, 0.5, 0.7, 1.0, and 1.5 Torr, respectively, in the 6000th cycle.
