Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model |
(color online) Spatial distributions of the cycle-averaged (a) electron density, (b) ion density, (c) electron density on powered electrode and on grounded electrode at the gas pressures of 0.3, 0.5, 0.7, 1.0, and 1.5 Torr in the 6000th cycle, respectively. |