Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model |
(color online) Evolutions of electron density at x = 0.5d for the gas pressures of 0.3, 0.5, 0.7, 1.0, and 1.5 Torr during 6000 cycles, respectively. The latter T in abscissa axis represents period (or cycle). |