All polymer asymmetric Mach–Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing
Liu Yu
, Sun Yue
, Yi Yun-Ji
†
, Tian Liang
, Cao Yue
, Chen Chang-Ming
, Sun Xiao-Qiang
, Zhang Da-Ming
SEM of SU-8 waveguide core layer with
dimensions.