Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Samir Tagra1, Liu Yue1, †, Zhao Lu-Lu1, 2, Zhou Yan-Wen3
       

(color online) Spatial distributions of electron ohmic heating for driving frequencies of (a) 3.39 MHz in the 100th cycle, (b) 6.78 MHz in the 200th cycle, (c) 13.56 MHz in the 400th cycle, and (d) 27.12 MHz in the 800th cycle, at times of 1/4T, 2/4T, 3/4T, and 4/4T.