Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure |
(color online) Cycle-averaged spatial distributions of (a) electron pressure cooling, (b) electron ohmic heating, (c) electron heating, and (d) electron energy loss at 18 μs for driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz, respectively. |