Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Samir Tagra1, Liu Yue1, †, Zhao Lu-Lu1, 2, Zhou Yan-Wen3
       

(color online) Cycle-averaged spatial distributions of (a) electric fields, (b) electron temperatures, (c) electron densities, (d) electric potentials in steady stage at driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz, respectively.