Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
(color online) Evolutions of the maximal electron densities at driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz.
Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure |
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(color online) Evolutions of the maximal electron densities at driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz. |
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