The residual C concentration control for low temperature growth p-type GaN*

Project supported by the National Key Research and Development Program of China (Grant Nos. 2016YFB0401801 and 2016YFB0400803), the National Natural Science Foundation of China (Grant Nos. 61674138, 61674139, 61604145, 61574135, 61574134, 61474142, 61474110, 61377020, and 61376089), the Science Challenge Project (Grant No. JCKY2016212A503), and Beijing Municipal Science and Technology Project (Grant No. Z161100002116037).

Liu Shuang-Tao1, Zhao De-Gang1, 2, †, Yang Jing1, ‡, Jiang De-Sheng1, Liang Feng1, Chen Ping1, Zhu Jian-Jun1, Liu Zong-Shun1, Li Xiang1, Liu Wei1, Xing Yao1, Zhang Li-Qun3
       

(color online) The residual C concentration for p-GaN samples grown with different Cp2Mg flow rates. It is higher in A1 and B1 than in A and B, respectively.