Structural, optical, and electrical properties of Cu-doped ZrO<sub>2</sub> films prepared by magnetron co-sputtering<xref rid="cpb_26_10_106801_fn1" ref-type="fn">*</xref><fn id="cpb_26_10_106801_fn1"><label>*</label><p>Project supported by the National Natural Science Foundation of China (Grant Nos. 51272224 and 11164031)</p></fn>

Structural, optical, and electrical properties of Cu-doped ZrO₂ films prepared by magnetron co-sputtering**

Project supported by the National Natural Science Foundation of China (Grant Nos. 51272224 and 11164031)

Yao Nian-Qi, Liu Zhi-Chao, Gu Guang-Rui^†, Wu Bao-Jia

(color online) EDX spectra of CZO films formed at Cu content of (a) 5.93 at.%; (b) 7.18 at.%, and (c) 8.07 at.%.