Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing
XTEM images of NSG layers: (a) w/o Al at 400 °C, (b) 1 nm Al at 400 °C, (c) 3 nm Al at 600 °C.
Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing |
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XTEM images of NSG layers: (a) w/o Al at 400 °C, (b) 1 nm Al at 400 °C, (c) 3 nm Al at 600 °C. |
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