Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing<sup>

Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing

Meng Xiao-Ran^{1, 2}, Ping Yun-Xia^{1, †}, Yu Wen-Jie², Xue Zhong-Ying², Wei Xing², Zhang Miao², Di Zeng-Feng², Zhang Bo^{2, ‡}, Zhao Qing-Tai³

(color online) RBS spectra of NSG layers formed at different temperatures: (a) w/o Al, (b) 1 nm Al, (c) 3 nm Al.