Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing
(color online) Schematic diagrams of Ni/Al/SiGe systems and the corresponding RBS measurements: (a), (b) 1 nm Al; (c), (d) 3 nm Al.
Impact of Al addition on the formation of Ni germanosilicide layers under different temperature annealing |
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(color online) Schematic diagrams of Ni/Al/SiGe systems and the corresponding RBS measurements: (a), (b) 1 nm Al; (c), (d) 3 nm Al. |
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