Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
Zhang Yue
1
, Ye Chao
1, 2, †
, Wang Xiang-Ying
3
, Yang Pei-Fang
1
, Guo Jia-Min
1
, Zhang Su
3
Variation of particles density (nanoparticle, nucleation, or island) with sputtering power.