Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
SEM images of Ag films deposited at 50 W by (a) 27.12 MHz and (b) 13.56 MHz magnetron sputtering.
Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering |
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SEM images of Ag films deposited at 50 W by (a) 27.12 MHz and (b) 13.56 MHz magnetron sputtering. |
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