Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
(color online) SEM images of Ag films deposited at 50–250 W by the 60 MHz VHF magnetron sputtering.
Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering |
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(color online) SEM images of Ag films deposited at 50–250 W by the 60 MHz VHF magnetron sputtering. |
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