Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
Zhang Yue1, Ye Chao1, 2, †, Wang Xiang-Ying3, Yang Pei-Fang1, Guo Jia-Min1, Zhang Su3
       

(color online) SEM images of Ag films deposited at 50–250 W by the 60 MHz VHF magnetron sputtering.