Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering
Zhang Yue1, Ye Chao1, 2, †, Wang Xiang-Ying3, Yang Pei-Fang1, Guo Jia-Min1, Zhang Su3
       

IVDFs of 60 MHz VHF magnetron sputtering at the sputtering power of 50–250 W.