Fabrication and characterization of ultra-low noise narrow and wide band Josephson parametric amplifiers
Huang Keqiang1, 3, Guo Qiujiang2, Song Chao2, Zheng Yarui1, Deng Hui1, Wu Yulin1, 4, Jin Yirong1, Zhu Xiaobo1, 4, †, Zheng Dongning1, 3, ‡
       

(color online) The schematic diagram of multilayer micro-fabrication process.