Fabrication and characterization of ultra-low noise narrow and wide band Josephson parametric amplifiers
Huang Keqiang
1, 3
, Guo Qiujiang
2
, Song Chao
2
, Zheng Yarui
1
, Deng Hui
1
, Wu Yulin
1, 4
, Jin Yirong
1
, Zhu Xiaobo
1, 4, †
, Zheng Dongning
1, 3, ‡
(color online) The schematic diagram of multilayer micro-fabrication process.