The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology
Zheng Jia-Xin
1
, Ma Xiao-Hua
1, †
, Lu Yang
2
, Zhao Bo-Chao
2
, Zhang Heng-Shuang
2
, Zhang Meng
1
, Chen Li-Xiang
1
, Zhu Qing
1
, Hao Yue
2
(color online) The
Q
-factor dependence of the air-bridge height for different inductors.