The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology
Zheng Jia-Xin1, Ma Xiao-Hua1, †, Lu Yang2, Zhao Bo-Chao2, Zhang Heng-Shuang2, Zhang Meng1, Chen Li-Xiang1, Zhu Qing1, Hao Yue2
(color online) The measured S-parameters for inductor 1 with the air-bridge heights of , , , , and in the frequency range from 0.1 GHz to 60 GHz, (a) S11 and (b) S21.