The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology
Zheng Jia-Xin1, Ma Xiao-Hua1, †, Lu Yang2, Zhao Bo-Chao2, Zhang Heng-Shuang2, Zhang Meng1, Chen Li-Xiang1, Zhu Qing1, Hao Yue2
       

(color online) The maximum electric field intensity () of the air-bridge with different heights, (a) in SiN, and (b) in air.