The coupling effect of air-bridges on broadband spiral inductors in SiC-based MMIC technology
Zheng Jia-Xin1, Ma Xiao-Hua1, †, Lu Yang2, Zhao Bo-Chao2, Zhang Heng-Shuang2, Zhang Meng1, Chen Li-Xiang1, Zhu Qing1, Hao Yue2
       

(color online) (a) The microphotograph of the fabricated on-chip spiral inductors on SiC substrate, (b) the scanning electron microscopy (SEM) image of the air-bridges, and (c) the SEM image of a single air-bridge.