Improvement of the high-κ/Ge interface thermal stability using an in-situ ozone treatment characterized by conductive atomic force microscopy
(color online) (a) Slope and (b) y-intercept values of the fit (solid) lines in Fig.
Improvement of the high-κ/Ge interface thermal stability using an in-situ ozone treatment characterized by conductive atomic force microscopy |
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(color online) (a) Slope and (b) y-intercept values of the fit (solid) lines in Fig. |
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