Surface plasmon-enhanced dual-band infrared absorber for VO<sub><em>x</em></sub>-based microbolometer application

Surface plasmon-enhanced dual-band infrared absorber for VO_x-based microbolometer application

Li Qi¹, Yu Bing-qiang¹, Li Zhao-feng^{2, 6, †}, Wang Xiao-feng^{3, 4, ‡}, Zhang Zi-chen^{4, 5}, Pan Ling-feng^{3, 4}

(color online) Absorption spectra of dual-band absorber for (a) different thicknesses of the gold disk (from 45 nm to 50 nm), (b) different thicknesses of VO₂ thin film (from 45 nm to 50 nm), (c) different thicknesses of SiN thin film (from 180 nm to 220 nm).