Double-gate-all-around tunnel field-effect transistor

Zhang Wen-Hao¹, Li Zun-Chao^{1, 2, †}, Guan Yun-He¹, Zhang Ye-Fei¹

(color online) (a) Schematic cross-section of the DGAA-TFET. (b) 3D structure of the DGAA-TFET. (c) Schematic cross-section of the GAA-TFET. (d) 3D structure of the GAA-TFET. (e) Fabrication process of the DGAA-TFET.