Bridge-free fabrication process for Al/AlO<sub><i>x</i></sub>/Al Josephson junctions

Bridge-free fabrication process for Al/AlO_x/Al Josephson junctions

Zhang Ke¹, Li Meng-Meng¹, Liu Qiang¹, Yu Hai-Feng^{1, 2, †}, Yu Yang^{1, 2}

(color online) Schematic diagrams of the PMMA pattern formed by our single-layer e-beam lithography process. The Josephson junctions are formed in the center of the cross after two-angle evaporation. (a) The pattern for the micrometer size junction. (b) The pattern for the nanometer size junction.