Growth and characterization of AlN epilayers using pulsed metal organic chemical vapor deposition
Ji Zesheng1, Wang Lianshan1, 2, †, Zhao Guijuan1, Meng Yulin1, Li Fangzheng1, Li Huijie1, Yang Shaoyan1, Wang Zhanguo1
       

Schematic of the AlN deposition and reaction pathways.[13]