Analytical capacitance model for 14 nm FinFET considering dual-<i>k</i> spacer

Analytical capacitance model for 14 nm FinFET considering dual-k spacer

Zheng Fang-Lin, Liu Cheng-Sheng, Ren Jia-Qi, Shi Yan-Ling, Sun Ya-Bin, Li Xiao-Jin^†

(color online) Approximation for calculating .