Analytical capacitance model for 14 nm FinFET considering dual-k spacer
(color online) Parasitic capacitance of FinFET with various (a), (b) fin width, (c) spacer thickness, (d) fin height, (e) gate height, (f) fin pitch, and (g) fin number.
Analytical capacitance model for 14 nm FinFET considering dual-k spacer |
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(color online) Parasitic capacitance of FinFET with various (a), (b) fin width, (c) spacer thickness, (d) fin height, (e) gate height, (f) fin pitch, and (g) fin number. |
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