Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics
(color online) Attracted ion flux (black dashed line) and plasma peak density (blue line) under different applied power.
Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics |
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(color online) Attracted ion flux (black dashed line) and plasma peak density (blue line) under different applied power. |
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