Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics
(color online) Time-averaged distributions of the electron density in different applied power: (a) 5 kW and (b) 50 kW.
Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics |
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(color online) Time-averaged distributions of the electron density in different applied power: (a) 5 kW and (b) 50 kW. |
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