Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics

Bi Zhen-Hua¹, Hong Yi¹, Lei Guang-Jiu², Wang Shuai³, Wang You-Nian⁴, Liu Dong-Ping^{1, †}

(color online) Comparison of the time-averaged plasma potential distribution (in units of V) between (a) regular discharge chamber and (b) new retrofitted discharge chamber with an inner tube (the blank area in left side).