Influence of a centered dielectric tube on inductively coupled plasma source: Chamber structures and plasma characteristics

Bi Zhen-Hua¹, Hong Yi¹, Lei Guang-Jiu², Wang Shuai³, Wang You-Nian⁴, Liu Dong-Ping^{1, †}

(color online) Radial distributions of the electron densities at the bottom part of the source reactor. The black line shows the electron density in original regular chamber (Fig. 1(a)) and the red dashed line shows the case in the new retrofitted chamber (Fig. 1(b)).