Magnesium incorporation efficiencies in MgxZn1−xO films on ZnO substrates grown by metalorganic chemical vapor deposition

Magnesium incorporation efficiencies in Mg_xZn_1−xO films on ZnO substrates grown by metalorganic chemical vapor deposition

Hu Qi-Chang¹, Kai Ding^{2, †}

(color online) XPS spectra of Mg 1s of Mg_xZn_1−xO films under different reactor pressures, recorded after 20-s Ar sputtering.