Magnesium incorporation efficiencies in MgxZn1−xO films on ZnO substrates grown by metalorganic chemical vapor deposition

Magnesium incorporation efficiencies in Mg_xZn_1−xO films on ZnO substrates grown by metalorganic chemical vapor deposition

Hu Qi-Chang¹, Kai Ding^{2, †}

(color online) Scanning electron microscope images of Mg_xZn_1−xO films grown on ZnO substrate at various growth parameters: ((a), (b), and (c)) various growth temperatures; ((c), (d), and (e)) various reactor pressure; ((c), (f), and (g)) various VI/II ratios; (h) Mg_xZn_1−xO films grown on quartz substrate as a reference.