Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition

Influences of different oxidants on characteristics of La₂O₃/Al₂O₃ nanolaminates deposited by atomic layer deposition

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Li Duan¹, Zhang Yan¹, Yu Xiao-Chen¹

(color online) Breakdown characteristics of Al/La /Al nanolaminates/Si MIS capacitors with different oxidants.