Influences of different oxidants on characteristics of La2O3/Al2O3 nanolaminates deposited by atomic layer deposition

Influences of different oxidants on characteristics of La₂O₃/Al₂O₃ nanolaminates deposited by atomic layer deposition

Fan Ji-Bin^{1, †}, Liu Hong-Xia², Li Duan¹, Zhang Yan¹, Yu Xiao-Chen¹

(color online)The C–V characteristics of La /Al nanolaminates deposited by ALD with different oxidants before and after annealing (f = 100 kHz).