Effect of driving frequency on the structure of silicon grown on Ag (111) films by very-high-frequency magnetron sputtering*

Project supported by the National Natural Science Foundation of China (Grant Nos. 11675118 and 11275136).

Guo Jia-Min1, Ye Chao1, 2, †, Wang Xiang-Ying3, Yang Pei-Fang1, Zhang Su3
       

(color online) IVDFs of (a) 40.68-MHz and (b) 60-MHz sputtering.