Enhanced thermal stability of VCSEL array by thermoelectric analysis-based optimization of mesas distribution Project supported by the National Natural Science Foundation of China (Grant Nos. 61434005, 61474118, 61376070, 11404326, and 11674314), the Jilin Provincial Scientific and Technological Development Program, China (Grant No. 20150203011GX), the Changchun Science and Technology Project, Jilin Province, China (Grant No. 15SS02), and the Youth Innovation Promotion Association, Chinese Academy of Sciences (Grant No. 2017260). |
(color online) (a) Top view of a bottom emitting 4×4 VCSEL array. ms1: Edge mesa space; ms2: Middle mesa space; em1: Edge mesas; em2: 2nd row of mesas. d is the distance of two mesas’ edges. (b) Real mesa diameter is 150 μm while the simulation diameter is 100 μm. |