(color online) (a) Optical microscope image of the central region of the fabricated phase qubit. The substrate appears greenish in color while the darker and brighter parts are the Nb and Al films. The interdigitated capacitor at the left side is used as a coupling to the neighboring component. The red open square and circles enclose the shadow evaporated junctions of the qubit and detector SQUID, respectively. SEM images of the qubit junction and two junctions in one of the SQUID arms are shown in panels (b) and (c). The design layout is illustrated in panel (d), in which the Nb (gray), the first Al (green), the Si (half transparent), the second Al (blue), and the shadow evaporated Al (light gray) films are prepared successively (see text for details). The horizontal bars at right-bottom corner in panels (a), (b), and (c) indicate lengths of 100, 1, and , respectively. The grid cell dimension in panel (d) is .