High quality factor superconducting coplanar waveguide fabricated with TiN
Liu Qiang1, Xue Guang-Ming2, Tan Xin-Sheng1, Yu Hai-Feng1, 3, †, Yu Yang1, 3,
       

(color online) Inner quality factor (in logarithm to base 10) dependence on input power of CPW fabricated on TiN film grown on sapphire. The solid line represents a smooth curve of . Inner quality is about 1.2 × in multi-photon limit while it is about 1.5 × in single-photon limit.