High quality factor superconducting coplanar waveguide fabricated with TiN
XRD result of TiN film grown on sapphire. (111)-TiN peak at 2θ around 37.5° and (200)-TiN peak at 2θ around 43° are both present.
High quality factor superconducting coplanar waveguide fabricated with TiN |
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XRD result of TiN film grown on sapphire. (111)-TiN peak at 2θ around 37.5° and (200)-TiN peak at 2θ around 43° are both present. |
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